Affordable high-throughput, high-resolution, maskless photolithographic patterning for research, product development and low-volume or customized manufacturing.

ZP-150 Performance Specifications
Minimum Feature Size: 200 nm with 0.85 NA lens array
600 nm with 0.30 NA lens array
Number of Parallel Beams: 1000
Dose Uniformity: <1% across all 1000 beams
Writing Speed: 1.7 mm2/sec, 100 mm2/min @
NA=0.85, 200 nm features

process-dependent; increases in throughput are possible at lower resolution
Grayscale: Optimized 8-bit grayscale in every pixel
Design Grid: 5nm
Positioning Resolution: 1.2nm
Maximum Pattern Area: 150mm x150mm
Alignment / Overlay: <50nm
Field Size: Up to 150mm x 150 mm
(stage travel limit)
Exposure Wavelength: 405nm (I-line, G-line compatible)
Environmental Enclosure: Particulates to ISO Class 5,
temperature to 0.1°C
Control Software: LithZone platform-independent, remote access web app
Layout Format: GDS II / OASIS
Computation: Nvidia GPU Server, 6TeraFlops with 4608 parallel cores
File Archive: 30 TB PCI-express storage server

Physical Aspects & Facilitation
Footprint: ZP-150: 60” wide x 40” deep x 72” high
Electronics Rack: 24” wide x 30” deep x 48” high
Clearance: Recommended minimum clearance 36” behind the tool, 48” in Total: Approximately 10’ x 12’ (including machine access and desk)
Weight: ZP-150: ~2500 lb.
Electronics Rack: ~400 lb.
Electrical: ZP150: 30 Amp, 208 to 240 VAC
Compressed Air: Compressed dry air to ISO Class 4 or better (15 micron filter, 37.4˚F dew point, 1 mg/m3 oil vapor). We strongly recommend the use of an oil-less air compressor. Supply requirements: 15 scfh @ 100 psi
Vacuum: Vacuum to 20” Hg minimum
Environment: The ZP-150 includes an environmental enclosure for critical areas of the tool controlled to ISO Class 4-5 for particulates, and temperature stabilized to 0.1°C. We recommend the installation environment be clean to better than ISO Class 7 (Fed Std. 209E Class 10,000) with temperature stability better than 5°C.
Vibration: Recommended environmental vibration criterion better than VC-C (500 micro-in/sec). Installation on ground-level concrete or other solid flooring recommended. Pneumatic isolation is integrated in the ZP-150 making floor-level isolation unnecessary.
Facility Access: All components of the ZP-150 are fully castered to simplify movement and location in the lab. If necessary, all components will fit through a single 84”x36” door opening although we recommend double-wide door access.