Lumarray is developing a maskless photolithography system that departs from the conventional by employing an array of microlenses rather than a single projector.
Our technology, Zone-Plate-Array Lithography (ZPAL), developed originally at MIT, integrates advances in microfabrication, micromechanics,high-speed computation and auto correction to produce a lithography tool that will accelerate innovation in micro- and nanotechnologies, from electronics and photonics to materials science and the life sciences.
LumArray, Inc. was founded in 2002, originally as an LLC and later converted to a corporation. It’s a spinoff from the NanoStructures laboratory at MIT, which was founded in 1977 by Prof. Henry I. Smith, President of LumArray. LumArray's expertise is derived from over 40 years of forefront research on lithography at MIT.
Dr. Henry I. Smith
President and Acting Chief Executive Officer (CEO)
Henry I. Smith is the President and acting CEO of LumArray, as well as a Professor Emeritus of Electrical Engineering at MIT. He and his co-workers were responsible for a number of innovations in nanostructures technology and applications including: comformable-photomask lithography, x-ray lithography, the phase-shift mask, the attenuating phase shifter, spatial-phase-locked e-beam lithography, achromatic-interference lithography, spatial-frequency doubling, coherent-diffraction lithography, immersion photolithography, zone-plate-array lithography, absorbance-modulation optical lithography, interferometric alignment, graphoepitaxy, templated self-assembly, and a variety of quantum-effect, short-channel, single-electron, nanomagnetic, photonic-crystal and microphotonic devices. Prof. Smith is a member of the National Academy of Engineering and a Fellow of the American Academy of Arts and Sciences, the National Academy of Inventors, the IEEE, the Optical Society of America and the International Society for Nanomanufacturing. He holds over 40 US patents and has published over 400 technical articles.
Dr. Michael Walsh
Chief Technical Officer (CTO)
Michael E. Walsh received his Ph.D (2004) and M.S. (2000) degrees from the Massachusetts Institute of Technology. He is currently managing the development of LumArray's prototype zone-plate-array lithography system. His doctoral thesis, entitled "On the design of lithographic interferometers and their application", contains numerous novel technical and theoretical advances in the field of high-resolution optical lithography, including the correction of systematic aberrations, novel high-resolution photoresist processes, and solid-immersion interference lithography. He has applied these advancements to the fabrication of a variety of devices including magnetic-random-access memories, DFB lasers, and self-assembled systems. He is the author of more than 12 technical articles and 2 patents in the fields of advanced lithography and the fabrication of nanostructures.
Dr. Feng Zhang
Vice President of Research
Dr. Zhang received his Ph.D. from the Massachusetts Institute of Technology (MIT) in 2005. He is the author of more than 5 technical articles and 1 patent in the fields of advanced lithography and fabrication processes. Since joining LumArray, Dr. Zhang has led the development of control software for LumArray’s ZP-150 Maskless Photolithography system, as well as software for proximity-effect correction and enhancing pattern placement.
Dr. Juan Ferrera
Juan Ferrera’s PhD research dealt with improving the placement accuracy of scanning-electron-beam lithography using fiducial grids produced by interference lithography. At ETEC systems, Dr. Ferrera was a Hardware Development Engineer on a project for massively-parallel electron-beam lithography using arrays of microfabricated columns. Subsequently he worked as a consultant, assisting clients with problems in electron-beam and micro-electromechanical systems (MEMS) technology, as well as providing fabrication and prototyping services. At LumArray, Dr. Ferrera is responsible for the fabrication of zone-plate arrays and the development of various optical subsystems of LumArray’s ZP-150 maskless photolithography system. He is the author orco-author of 28 technical publications and two patents.
Board of Directors
The members of LumArray’s Board of Directors are Dr. Nicholas P. Economou, Chair, Dr. Michael Walsh, Dr. Henry I. Smith and Prof. Rajesh Menon.
Dr. Nicholas P. Economou
PointSpectrum Corporation CEO
In addition to chairing the Board, Dr. Economou is a key business advisor to LumArray. He is President and CEO of PointSpectrum Corporation, a developer and manufacturer of advanced optical devices for the display, solar energy and lighting industries. He is the former President of Carl Zeiss SMT, Inc., a developer and manufacturer of ultra-resolution microscopes for the semiconductor, materials-science, nanotechnology and life-sciences industries. Dr. Economou began his career as a researcher at Bell Laboratories and MIT Lincoln Laboratory before launching his first start-up company in 1984. Over the last 29 years, he has served as chief executive officer for several successful venture-backed technology companies in the semiconductor and telecommunications industries. During this time, his companies introduced gallium and helium focused-ion-beam technology to the marketplace. Hundreds of systems were sold to customers in the semiconductor, display, materials-research and life-science industries, establishing these technologies as essential parts of the manufacturing infrastructure. Dr. Economou currently serves as a director on the boards of a number of private and public technology companies. He received his B.A. in physics from Dartmouth College and his M.A. and Ph.D. in physics from Harvard University.
Dr. Michael Walsh
See resume above
Prof. Rajesh Menon
Professor of Electrical Engineering at Univ. Utah
One of the founders of LumArray and formerly an employee of LumArray is currently Professor of Electrical Engineering at Univ. Utah. Continuing the tradition of the NSL at MIT Prof. Menon develops technologies for
improved patterning and explores photonic applications of diffractive-optical structures. Particularly important is Prof. Menon’s research on Absorbance Modulation Optical Lithography (AMOL), which was patented at MIT.
AMOL provides a means for surmounting the so-called diffraction barrier and thereby achieve deep sub-100 nm resolution lithography using near UV sources.
Board of Advisors
Dr. Nicholas P. Economou
As indicated in his bio above, Nick brings 29 years of experience as chief executive officer for several successful venture-backed technology companies, including companies that marketed focused-ion-beam tools to the semiconductor industry and for R&D. He currently serves as a director on the boards of several private and public technology companies.
Dr. Yet-Ming Chiang
Kyocera Professor in the Dept of Materials Science and Engineering at MIT. Prof. Chiang has founded 4 spin-out companies based on MIT research: American Superconductor (NASDAQ: AMSC); A123 Systems (recently sold); Entra Pharmaceuticals (private) and 24M Technologies (private). His companies have raised in excess of $500MM in private capital and in excessof $500MM in government grants and loans. He will provide his firsthand expertise in growing technology-based spinout companies.
A retired business lawyer, with more than 35 years of experience in private practice and industry. He served as legal advisor to LumArray until his retirement in 2012. Based on his familiarity with LumArray's team, its intellectual property and its business objectives, Mr. Rothberg's advice, primarily related to business strategy, will continue to be of significant value as our business model evolves.
Retired Director of Advanced Technology Labs, Northrop Grumman Corp. Phil brings experience in project management and the manufacturing needs of companies that supply custom electronics to the Department of Defense.
Dr. Timothy Groves
Prof at University of Albany. Prior to joining academia, Tim spent many years at Leica E-beam systems (now Vistec, Corp) developing high-performance scanning-electron-beam-lithography systems and marketed them to industrial and academic laboratories.
The MIT Entrepreneurial Ecosystem
In addition to the individuals above, LumArray, by virtue of its association with MIT (MIT owns 5% equity in LumArray and LumArray’s President, Henry I. Smith, is Emeritus professor at MIT) has complete access to the entrepreneurial ecosystem in and around MIT which promotes and advises high-technology spin-off companies. Members of this ecosystem include, the MIT Entrepreneurship Center, the MIT Deshpande Center for Technological Innovation, the MIT Venture Mentoring Service, the MIT Technology Licensing Office, and a variety of external advisors, including serial entrepreneurs, angel and venture investors, and legal counselors.