| Lumarray is a lithography company with a
state-of-the-art-patented technology, developed at MIT, that departs
from a century old tradition of conventional optics. Our technology,
Zone-Plate-Array Lithography (ZPAL), integrates recent advances in
microfabrication, micromechanics and fast computing to produce a
lithography tool that will handle the lithographic needs of the decades
to come. |
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A specification sheet for our latest system, ZP150
can be found in PDF format here.
A recent review article on ZPAL from Materials
Today can be found here.
A recent presentation from SPIE Microlithography 2005 can be found here.
We at Lumarray believe that it is time to provide a
completely new way of doing lithography that will be advantageous in
terms of cost and flexibility. We are working to commercialize a
high-throughput maskless lithography tool that would allow for the
possibility to transfer a design drawn on a computer screen directly
onto a substrate. ZPAL technology is extendable to many future
generations of semiconductor devices and should be capable of reaching
the absolute limits of the lithographic process.
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